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Department of Mechanical Engineering, NKUST
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Introduction
Introduction
Chairman
Educational objectives and program outcomes
Academic Grouping
Featured Lab.
Location
Organization
Faculty
Design and Manufacturing
Opto-Mechatronics and Control
Materials and Energy
Staff
Retired Faculty
Research results
Teacher Research results
Academics
Curriculum
English-Instructed Course
Regulations
Course Outline
Index
Organization
Faculty
Faculty
Faculty
Design and Manufacturing
Opto-Mechatronics and Control
Materials and Energy
Staff
Retired Faculty
School Year
93
Level
(SCI)
Paper Title
Effect of phase formation behavior on thermal stability of hafuium based thin film for copper interconnects
Journal Title
Jpn J. Appl. Phys.
Volume
1
Type Of Author
First Author