102
(口頭報告)
(EI)
Microelectroforming of a nickel plate featured with anti-stiction for a piezoelectric atomizer
the 8th IEEE International Conference of Nano/Micro Engineered and Molecular Systems (NEMS2013)
IEEE
Jheng-Jhin Huang and Chin-Tai Chen
2013-04-05
2013-04-09
2
Corresponding Author
